MEMS Solutions

MEMS solutions for flow controlMicroElectroMechanical Systems (MEMS) are systems that incorporate mechanical and electrical elements into an integrated micro device capable of a variety of tasks. With its miniaturized compact form, MEMS-based technologies are not only able to accomplish the same tasks as their larger traditional equivalents but with improved performance and cost efficiencies.


The benefits and advantages of MEMS have greatly expanded its use in many different applications, including:

  • Oscillators and resonators in consumer electronics/computing
  • Accelerometers and sensors in automobiles
  • Flow control valves in heating, ventilation, air conditioning and refrigeration (HVAC-R)

The proven potential of MEMS revolutionizing today’s technologies have led the fast growing MEMS market to be valued at over $14 billion. It is projected to continue growing as increasing capabilities of MEMS are discovered and implemented for better and more efficient technology.


At DMQ, we strive to develop new MEMS-based technologies for flow control solutions that address the demands and needs for improved system precision and performance efficiency. From our patented silQflo® Silicon Servo Valve (SSV), a semiconductor microfluidic MEMS microvalve that can be incorporated in any flow control related appliance or system, to our Modular Silicon Expansion Valve (MSEV) and Universal SuperHeat Controller/Sensor (USHX) that are specialized in design for refrigeration and HVAC applications, our products aim to provide seamless operation to any flow control system.