MEMS Sensing Technology

MEMS based sensory technology has many applications in areas where the collection of real time data is crucial input to determine the appropriate output. With improved accuracy and sensitivity, MEMS sensory technology is commonly used in pressure/temperature sensors, accelerometers, and gyroscopes found in appliances, automobiles, aviation and more.


To optimize the performance of any fluid control system, precise monitoring of system parameters along with compatibility between sensor and mechanical counterpart are two common issues that need to be addressed. DMQ’s MEMS sensory technology starts with the Universal SuperHeat Controller/Sensor (USHX). The USHX provides real time calculation of pressure, temperature, and superheats data. It can interact directly with the MEMS valve accordingly to produce the appropriate valve response to maintain a consistent parameter. It is built with a Windows based Graphical User Interface (GUI) that allows for customizable settings to capture the wide range of any particular requirements necessary. In addition to the MSEV, it can be easily integrated in any existing HVAC/R system structure for seamless operation.


The quick and accurate detection of system conditions by DMQ’s sensors in conjunction with specialized tailored algorithms and a closed loop feedback system, allow for smooth adjustments to maintain consistent parameter conditions and help to create a system that proves to be highly adaptable under any functionally given load.